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Best Presentation Award is delivered to the paper entitled Surface Activated Cu/SiO2 Hybrid Bonding for Room Temperature 3D Integration K. Abadie1, P. Renaud1, F. Fournel1, L. G. Michaud2, M. Danner2, M. Dornetshumer2, C. Lecouvey1, A-M Papon1, I. Chevalier1, T. Monniez1, C. Matei1, T. David1, S. Dominguez1, and C. Dubarry11 Univ. Grenoble Alpes, CEA, LETI, 2 EV Group Best Poster Presentation Awards are delivered to the papers entitled Blade Test to Characterize Bonded Interface Fabricated Using Atomic Diffusion Bonding with Amorphous Si and Al Films H. Iemura1,2, M. Uomoto1, and T. Shimatsu1,31 Frontier Research Institute for Interdisciplinary Sciences (FRIS), Tohoku University, 2 Department of Electronic Engineering, Graduate School of Engineering, Tohoku University 3 Research Institute of Electrical Communication (RIEC) , Tohoku University Heat Dissipation Characteristics of GaN-on-Polycrystalline-Diamond HEMTs C. Moriyama1, Y. Sakaida2, H. Uratani2, Y. Ohno3, K. Inoue3, Y. Nagai3, N. Shigekawa1, and J. Liang11 Graduate School of Engineering, Osaka Metropolitan University, 2 SiC Division, Air Water Inc., 3Insitute for Materials Research (IMR), Tohoku University 100 GHz Thin-Film LNOI/Si Optical Modulator Fabricated by Room Temperature Wafer Bonding S. Murakami1, Y. Katoda1, Y. Yamaguchi2, T. Sakamoto3, R. Takigawa11 Graduate School of Information Science and Electrical Engineering, Kyushu University 2 National Institute of Information and Communications Technology (NICT) 3 Department of Electrical Engineering and Computer Science, Tokyo Metropolitan University |